德儀科技有限公司專業進口美國磁控濺射、電子束蒸發、熱蒸發和脈沖激光真空薄膜沉積設備，以及磁控濺射源/電源、電子束蒸發源、濺射靶材和蒸發材料等。十幾年來，憑著的品質，*的技術和周到的技術服務，德儀公司的產品為中國的高校、科研院所及企業的薄膜沉積工作提供了有力的支持
PLD Components
PLD substrate manipulator with 2" quartz lamp heater and gas shower ring.
We offers an extensive line of substrate and target manipulators as well as load lock and sample transfer systems for PLD systems. Our standard modular components can be configured in a variety of ways to meet your specific PLD system design. We can also design, integrate and certify complete PLD systems.
| Orientation | Vertical or Horizontal |
| X-Y movement | ±0.5" or ±1.0" |
| Substrate sample | size <2" diameter |
| Targets | 6 - 1" （other configurations available） |
| Sample orientation | any |
| Sample heating | SHQ to 700°C （water-cooled heater） |
| Vacuum environment | UHV, O2 |
| In-vacuum sample transfer | optional |
| Base flange | 8" |
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